Lithography Lab


List of Equipments


  • Laser Writer (Heidelberg DWL 66fs)
  • Wet Bench (Organic solvents)
  • Spin Dryer (Calitech CT-608S)
  • Spin Coater (CEE 200X)
  • Hot Plates (3)
  • Mask Aligner (MBJ4)
  • Inspection Microscope (Olympus BX-51M)
  • Stylus Profiler (Dektak XT)
  • Wet Bench (Piranha)
  • AJA Evaporator
  • Plasma Etcher